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Inside microchips are nanometer-sized transistors and wires, but how are these nanoscopic structures built? Well, in this video, we’ll explore the EUV Photolithography System built by ASML. This 150-million-dollar machine is essentially a microchip photocopier; it takes the design of a microchip and copies it across hundreds of microchips on a silicon wafer. This EUV Photolithography System is one of the most complex machines ever made, and it encompasses an entire world of science and engineering within it. Specifically in this video, we'll dive deep into the EUV Lithography tool and explore how 13nm EUV light is produced, how the EUV light is focused onto a photomask, how the photomask, or mask, moves around, what the patterns on the mask look like, the projection optics, and how the wafer moves around and the wafer stage. So join us on this adventure into the world of EUV Photolithography! Enjoy!

Table of Contents:

00:00 - Exploring CPUs, GPUs, DRAM, SSDs, and SOCs

01:07 - Introduction to the Photolithography Systems

04:11 - Printing Nanoscopic Lines

06:09 - The Basics of CPU Manufacturing

10:50 - Different Types of Lithography Tools EUV vs DUV

12:51 - Why we use Extreme Ultra Violet Light

15:31 - Producing the EUV Light using Tin Droplets

18:21 - The Illumination Optics

19:09 - The Incredible Engineering inside EUV Lithography

19:49 - Bragg Reflections

20:54 - Illumination Settings

22:30 - ASML Sponsorship

22:58 - Exploring the Photomask or Reticle

25:05 - Chip Patterns on a 300mm Wafer

27:27 - Branch Education Hours of Work

28:19 - Projection Optics Rayleigh's Criterion Equation

30:53 - Lithography Cluster

32:27 - Wafer Alignment

35:07 - Photoresist

36:01 - Wafer Transport

37:52 - Outro

We're working on more ambitious subjects like How Computers Work. Any contribution would greatly help make these videos. https://www.patreon.com/brancheducation

Branch Education Website: https://www.branch.education

Branch Education Facebook: https://www.facebook.com/BranchEducation/

Key Branches from this video are: How are CPUs Made? https://youtu.be/dX9CGRZwD-w

Lead Animator: Mike Radjabov

Animation Team: Sherdil Davronov, Adrei Dulay, Muazzam Azizova, Abdulaziz Zokirov

Research, Script and Editing: Teddy Tablante

Twitter: @teddytablante

Modeling: Prakash Kakadiya

Image Editing: Randy Catequista

Voice Over: Phil Lee

Sound Design by Drilu: www.drilu.world

Sound Design and mix: David Pinete

Additional Sound Design: Raúl Núñez

Supervising Sound Editor: Luis Huesca

Erratum:

Wikipedia contributors. "Extreme Ultraviolet Lithography", "Photolithography". Wikipedia, The Free Encyclopedia. Wikipedia, The Free Encyclopedia, Visited May 19th 2025

A lot of information was gotten from the Semislides YouTube Channel. Additional input was provided by ASML

To understand how diffraction works, check out: https://falstad.com/mathphysics.html

#EUV #Chips #ASML